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Copyrolysis of AsH3 and PH3 in the epitaxial III-V alloys

✍ Scribed by A.S. Jordan; A. Roberston

Book ID
103171629
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
539 KB
Volume
137
Category
Article
ISSN
0022-0248

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## Abstract Epitaxial growth of GaAs has been achieved on CaF~2~, α‐Al~2~O~3~ and spinel substrates. X‐ray investigations showed well defined relations between layer perfection and the quality of substrate material. The formation of epitaxial layers in pyrolytic deposition processes is discussed in