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Convolution and deconvolution in Auger electron spectroscopy, with application to silicon. (USA)

Book ID
108389909
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
168 KB
Volume
28
Category
Article
ISSN
0042-207X

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## Abstract We evaluated and measured the influence of channelling on changes in intensity of the characteristic lines and background of Auger electron spectra by performing calculations and experiments on an aluminium single crystal. Propagation of the incident beam in the crystal was calculated