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Convert flanged systems to UHV

Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
186 KB
Volume
1997
Category
Article
ISSN
1350-4789

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An UHV dynamic expansion system to study gassing and outgassing of metals under friction in vacuum has been developed. The vacuum chamber of the system has two main parts separated by a wall with a central oriยฎce of nominal conductance of 5.27 l s ร€ 1 for N 2 at 300 K. The main part of the system is