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Conversion process of chlorine containing polysilanes into silicon carbide

✍ Scribed by H. P. Martin; E. Müller; E. Brendler

Publisher: Springer
Year: 1996
Tongue: English
Weight: 498 KB
Volume: 31
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00356461

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