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Conversion of silicon nitride into silicon dioxide through the influence of oxygen

✍ Scribed by I. Fränz; W. Langheinrich

Book ID: 107855948
Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 562 KB
Volume: 14
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(71)90060-8

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