✦ LIBER ✦
Conversion of silicon nitride into silicon dioxide through the influence of oxygen : I. Franz and W. Langheinrich. Solid State Electron.14 (1971), p. 499
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 108 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0026-2714
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