๐”– Bobbio Scriptorium
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Controversies in micro-injection

โœ Scribed by S. C. Ng; T. A. Bongso; S. L. Liow; R. Edirisinghe; V. Tok; S. S. Ratnam


Book ID
105116525
Publisher
Springer US
Year
1992
Tongue
English
Weight
316 KB
Volume
9
Category
Article
ISSN
1573-7330

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Micro fabrication of polymers is becoming increasingly important and is considered a low-cost alternative to silicon-or glass-based MEMS technologies. However, very little work has been done to study the influence of polymer resin on the replication accuracy of the micro features in micro injection