Controlling threading dislocation densities in Ge on Si using graded SiGe layers and chemical-mechanical polishing

✍ Scribed by Currie, M. T.; Samavedam, S. B.; Langdo, T. A.; Leitz, C. W.; Fitzgerald, E. A.

• Book ID: 121469876
• Publisher: American Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 527 KB
• Volume: 72
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.121162