Controlling energy deposition during the C60+ bombardment of silicon: The effect of incident angle geometry

✍ Scribed by Joseph Kozole; Nicholas Winograd

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 662 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.259