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Controlled thermal kinetics in RTP

✍ Scribed by J. Niess; Ch. Grunwald; R. Strohmaier; Z. Nényei


Book ID
107457696
Publisher
Springer US
Year
1998
Tongue
English
Weight
511 KB
Volume
27
Category
Article
ISSN
0361-5235

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📜 SIMILAR VOLUMES


Controlled thermal kinetics in RTP
✍ J. Niess; Ch. Grunwald; R. Strohmaier; Z. Nényei 📂 Article 📅 1998 🏛 Springer US 🌐 English ⚖ 511 KB
Temperature uniformity in RTP using MIMO
✍ S. Morales; B. Dahhou 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 254 KB 👁 1 views

In this paper the problem of temperature uniformity in Rapid thermal processing is addressed by means of multivariable adaptive control. A multivariable linear discrete time CARIMA model of the highly non-linear process is identified on-line using a supervised identification schema. The control law