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Temperature uniformity in RTP using MIMO adaptive control

✍ Scribed by S. Morales; B. Dahhou

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 254 KB
Volume: 12
Category: Article
ISSN: 0890-6327
DOI: 10.1002/(sici)1099-1115(199805)12:3<227::aid-acs462>3.0.co;2-u

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✦ Synopsis

In this paper the problem of temperature uniformity in Rapid thermal processing is addressed by means of multivariable adaptive control. A multivariable linear discrete time CARIMA model of the highly non-linear process is identified on-line using a supervised identification schema. The control law is based on the minimization of an infinite time linear quadratic cost function with a partial state reference model. This reference model allows to incorporate an appropriate tracking capability into the linear quadratic control law. Experimental results of the application of the involved MIMO adaptive controller on a RTP system are presented.

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