Controlled steam oxidation of AlInAs for microelectronics and optoelectronics applications
β Scribed by P. Petit; P. Legay; G. Le Roux; G. Patriarche; G. Post; M. Quillec
- Publisher
- Springer US
- Year
- 1997
- Tongue
- English
- Weight
- 341 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0361-5235
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