Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films

✍ Scribed by Z. Rymuza; M. Misiak; L. Kuhn; K. Schmidt-Szałowski; Z. Rżanek-Boroch

• Publisher: Springer-Verlag
• Year: 1999
• Tongue: English
• Weight: 515 KB
• Volume: 5
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050161