Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review

✍ Scribed by Z. Rymuza

• Publisher: Springer-Verlag
• Year: 1999
• Tongue: English
• Weight: 206 KB
• Volume: 5
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050160