Control Technologies for Emerging Micro and Nanoscale Systems (Lecture Notes in Control and Information Sciences, 413)

✍ Scribed by Evangelos Eleftheriou (editor), S.O. Reza Moheimani (editor)

• Publisher: Springer
• Year: 2011
• Tongue: English
• Leaves: 300
• Category: Library

✦ Synopsis

This book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.

✦ Table of Contents

Titlepage
Preface
Contents
Techniques Developed for High-Speed AFM
Introduction
Imaging Speed and Feedback Bandwidth
Mechanical Devices in High-Speed AFM
Cantilevers
Scanners
Active Damping Techniques
Feedback Q-Control for z-Scanner
Feedforward Damping of x-Scanner
Practice of Active Damping of Scanner Vibrations
Dynamic PID Control
Drift Compensator
Bio-imaging
Dynamic Equilibrium at the Bacteriorhodopsin Crystal Edge
Structural Changes of Bacteriorhodopsin under Light
Conclusion
References
High-Accuracy Atomic Force Microscope
Introduction
Mechanical Design
Overall Metrology System
AFM Head
Self-sensing Probe for Frequency Measuring AFM
Self-sensing AFM Probe
Electromechanical Model
Frequency Measuring AFM
Probe Electronics Implementation
Sensing Curves
Control and Instrumentation
System Overview
Period Estimation
Tracking Control
Experimental Results
Single-Point Tests
Imaging Tests at MIT
Imaging Test after Integration with SAMM
References
High-Speed, Ultra-High-Precision Nanopositioning: A Signal Transformation Approach
Introduction
Objectives
Signal Transformation
Investigation of System Robustness
Incorporating Robustness in Signal Transformation
Experimental Results
Tracking Performance and Noise
References
2DOF Control Design for Nanopositioning
Introduction
Two Degree-of-Freedom Design
Feedforward Control Design for Fixed Feedback System
Improving Robustness to Operating Conditions for Given Feedback System
Simultaneous Feedback and Feedforward Control Design
Role of Feedforward and Feedback Components
Summary
References
Improving the Imaging Speed of AFM with Modern Control Techniques
Introduction
Improved Control of the Lateral Scanning Motion
Iterative Learning Control
Self-sensing Piezo Actuation
Controlling the Tip-Sample Interaction Forces
Dual Actuation
Imaging Results
Conclusion
References
Non-raster Scanning in Atomic Force Microscopy for High-Speed Imaging of Biopolymers
Introduction
Overview of Local Raster Scanning
AFM System Block
Detector Block
Estimator Block
Filter Block
Tip Trajectory Design Block
Controller Details
Sample Detection
Estimation of Curvature and Heading Direction
Filtering
Tip Trajectory
Summary
Simulation Experiments
Conclusion and Future Work
References
High-Bandwidth Intermittent-Contact Mode Scanning Probe Microscopy Using Electrostatically-Actuated Microcantilevers
Introduction
SPM Setup for IC-Mode Operation
Methodology
Input Shaping
Parallel IC Operation
Feedback for Reliable IC Operation
Experimental Results
Conclusion
References
Systems and Control Approach to Electro-Thermal Sensing
Introduction
Systems Model
Electro-Thermal Topography Sensor
Electro-Thermal Position Sensor
Feedback-Enhanced Electrothermal Sensing
Conclusion
References
Motion Controller for Atomic Force Microscopy Based Nanobiomanipulation
Introduction
System Modification and Identification
AFM Imaging
AFM Nanomanipulation
Hardware Modification
System Identification
Control Scheme Design Issues
Feedback Issue
Frequency Issue
Nonlinearity Issue
Design and Implementation of the Multiple-Input Single-Output System
Step Response Analysis
Continuous Input
Experimental Test of Control Scheme by a Nanobiomanipulation Task
Materials and Methods for Sample Preparation
Structural Characterization of Cell-Cell Adhesion Structure by Different Techniques
Experimental Setup and Results
Conclusion
References
Nanobioscience Based on Nanorobotic Manipulation
Introduction
Nanorobotic Manipulation System
Nanorobotic Manipulation System under Various Microscopes
Nanolaboratory Based on Nanorobotic Manipulations
Nanobioscience Applications Based on Nanorobotic Manipulations
Single-Cell Analysis and Nanosurgery System Based on Nanorobotic Manipulations
E-SEM Nanonanorobotic Manipulation System
Examples for Single-Cell Manipulations Based on E-SEM Nanorobotic Manipulation System
Future Direction of Nanobioscience Applications Based on Nanorobotic Manipulations – in vitro" Realization ofin vivo" Environment for Bio-medical Applications
Conclusion
References
Self-configuring CMOS Microsystems
Introduction
CMOS and MEMS Integration
Reconfigurable RF MEMS Capacitors
Self-configuring MEMS Probes
Self-healing RF Microresonator Systems
Conclusions
References
Capillary Force Actuation: A Mechatronic Perspective
Introduction
Microactuators
Capillary Force Actuation
Principle of Actuation
Electrowetting
Capillary Bridges
Equilibrium Actuator Force
Limiting Phenomena
Actuator Dynamics
Charging Dynamics
Fluid Model
Non-equilibrium Actuator Model
Equilibria
Alternative Configurations
Wetting Passive Surface Configuration
Pinned Passive Surface Configuration
Potential Applications
RF MEMS
Microgrippers
Micro-total Analysis Systems
Conclusions
References
Control and Estimation in Force Feedback Sensors
Introduction
Force Balance
Design of Force Feedback Systems
Determining the Observer Gains
A Tunneling Accelerometer
The Controller
Experiments
Summary
References
H2 Guaranteed Cost Control in Track-Following Servos
Introduction
Preliminaries
Hard Disk Drive Model
H2 Guaranteed Cost Analysis
Semi-definite Programming Approach
Riccati Equation Approach
Application to Hard Disk Drives
Full Information H2 Guaranteed Cost Control
Semi-definite Programming Approach
Riccati Equation Approach
Application to Hard Disk Drives
Output Feedback H2 Guaranteed Cost Control
Sequential Semi-definite Programming Approach
Riccati Equation and Semi-definite Programming Approach
Application to Hard Disk Drives
Conclusion
References
Lateral Tape Motion and Control Systems Design in Tape Storage
Introduction
System Description
Lateral Tape Motion
Stationary Periodic Components
Stack Shifts
Active Tape Guiding
Track-Follow Control System
Track-Follow Controller for Periodic Disturbances
Track-Follow Controller for Stack Shifts
Conclusion
References
Author Index