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Control system design and alignment methods for electron lithography

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📜 SIMILAR VOLUMES

Adaptive methods for control system desi

📂 Article 📅 1987 🏛 IEEE 🌐 English ⚖ 246 KB

Composition and detection of alignment m

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Precise and simple optical alignment met

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Research on probabilistic methods for co

✍ Giuseppe C. Calafiore; Fabrizio Dabbene; Roberto Tempo 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 559 KB

An algebraic method for control systems

✍ CHEN, C. F.; SHIEH, L. S. 📂 Article 📅 1970 🏛 Taylor and Francis Group 🌐 English ⚖ 350 KB

Concept, construction and commissioning

✍ O. Wilhelmi; S.S. Peredkov; A.L. Bogdanov 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 159 KB