Control of threading dislocation density at the initial growth stage of AlN on c-sapphire in plasma-assisted MBE

✍ Scribed by Nechaev, D.V.; Aseev, P.A.; Jmerik, V.N.; Brunkov, P.N.; Kuznetsova, Y.V.; Sitnikova, A.A.; Ratnikov, V.V.; Ivanov, S.V.

• Book ID: 121720225
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 882 KB
• Volume: 378
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2012.12.080