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Control of Structure and Film Thickness Using Spray Layer-by-Layer Method: Application to Double-Layer Anti-Reflection Film

✍ Scribed by Kyung, Kyu-Hong; Fujimoto, Kouji; Shiratori, Seimei

Book ID: 119975435
Publisher: Institute of Pure and Applied Physics
Year: 2011
Tongue: English
Weight: 733 KB
Volume: 50
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.50.035803

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