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Control of Resistance by Oxide on the Surface of Cu Interconnects With CuSiN and Ti-based Barrier Metal

✍ Scribed by Hayashi, Yumi; Matsunaga, Noriaki; Wada, Makoto; Nakao, Shinichi; Watanabe, Kei; Kato, Satoshi; Sakata, Atsuko; Kajita, Akihiro; Shibata, Hideki

Book ID: 118144993
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 963 KB
Volume: 60
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2012.2225144

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