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Control of morphology and crystallinity of chromium sputtered film

✍ Scribed by Takashi Kawanabe; Jingyu Park; Masahiko Naoe


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
528 KB
Volume
134
Category
Article
ISSN
0921-5093

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Hydroxyapatite (HA) was coated onto titanium substrates using radio frequency sputtering, and the sputtered films were crystallized under hydrothermal conditions at 110-170 β€’ C at pH values of 7.0 and 9.5. The crystallite size, the remnant film thickness, and the surface morphology of the films were