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Control of misoriented grains and pinholes in CoSi2 grown on Si(001)

โœ Scribed by L.J. Schowalter; J.R. Jimenez; L.M. Hsiung; K. Rajan; Shin Hashimoto; R.D. Thompson; S.S. Iyer


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
874 KB
Volume
111
Category
Article
ISSN
0022-0248

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