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Control of Chemical Reactions by Molecular Organization in Interfacial Thin Films

✍ Scribed by Kiyoshige Fukuda; Yoshio Shibasaki; Hiroo Nakahara


Publisher
John Wiley and Sons
Year
2006
Weight
8 KB
Volume
37
Category
Article
ISSN
0931-7597

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Metal-Organic Chemical Vapor Deposition
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Composition-controlled metal-organic chemical vapor deposition of La 2 CuO 4 thin films using ultraviolet absorption sensors to provide incoming precursor flux control is reported. These sensors provide a more flexible and sensitive alternative to ultrasonic sensors. The films were c-axis oriented a