Contribution of oxide traps on defect creation and LVSILC conduction in ultra thin gate oxide devices

✍ Scribed by D. Zander; F. Saigne; A. Meinertzhagen; C. Petit

• Book ID: 108361999
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 542 KB
• Volume: 43
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/s0026-2714(03)00264-6