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Contrast in the evanescent near field of λ/20 period gratings for photolithography

✍ Scribed by McNab, Sharee J. ;Blaikie, Richard J.

Book ID: 115348522
Publisher: The Optical Society
Year: 2000
Tongue: English
Weight: 116 KB
Volume: 39
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.39.000020

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