Contour deposition—a new epitaxial deposition technique for semiconductor devices and integrated circuits : T. Klein, Solid St. Electron., 9, (1966), p. 959

• Book ID: 111708926
• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 106 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90233-8