Rapid fabrication of highly textured CeO
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Takemi Muroga; Tomonori Watanabe; Seiki Miyata; Hiroyuki Iwai; Yutaka Yamada; Te
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Article
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2004
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Elsevier Science
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English
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We have proposed a self-epitaxy process for CeO 2 cap buffer layer deposition by using PLD in order to improve the deposition rate in the IBAD process. The process is combined with a thin IBAD buffer layer by a short time deposition and a self-epitaxy PLD cap layer by high rate deposition. The mater