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Contactless magnetically levitated silicon wafer transport system

โœ Scribed by K.H. Park; S.K. Lee; J.H. Yi; S.H. Kim; Y.K. Kwak; I.A. Wang

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
933 KB
Volume
6
Category
Article
ISSN
0957-4158

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โœฆ Synopsis

A new magnetically levitated wafer transport system is developed for the semiconductor fabrication process to get rid of the particle and oil contaminations that normally exist in conventional transport systems. The transport system consists of levitation, stabilization tracks, and a propelling system. Stabilities needed for levitation in the transport system are achieved by an antagonistic property produced in the tracks and using a simple feedback control. The continuous propelling force is obtained by sending specific current patterns to the propulsion coils. The dynamic model of the transport system is presented and analyzed.

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## Abstract This paper describes a maglev transportation system for automobiles. The track is an array of permanent magnet blocks, and the levitating body is the bedplate which consists of permanent magnet plates, propulsion coils, levitation coils, and guidance coils. The feature of this system is