Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum

✍ Scribed by H. Yamakawa; I. Moriyama; Y. Minamigawa; Y. Maeba; T. Takematsu; M. Nishitsuji; O. Fujiki; T. Asaishi; T. Koike

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 248 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)94109-4