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Contactless characterization of semiconductor devices using surface photocharge effect

✍ Scribed by Das, P.; Mihailov, V.; Ivanov, O.; Gueorgiev, V.; Andreev, S.; Pustovoit, V.I.

Book ID
118134617
Publisher
IEEE
Year
1992
Tongue
English
Weight
266 KB
Volume
13
Category
Article
ISSN
0741-3106

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## Abstract We review the use of the contactless methods of photoreflectance (PR), contactless electroreflectance (CER) and wavelength modulated differential surface photovoltage spectroscopy (DSPS) for the nondestructive, room temperature characterization of a wide variety of wafer‐scale III–V sem