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Contact resistivity of TiN on p+-Si and n+-Si

✍ Scribed by Manuela Finetti; Ilkka Suni; M.-A. Nicolet

Book ID: 103901450
Publisher: Elsevier Science
Year: 1983
Weight: 268 KB
Volume: 9
Category: Article
ISSN: 0379-6787
DOI: 10.1016/0379-6787(83)90044-3

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