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Contact impedance of grounded and capacitive electrodes

✍ Scribed by Hordt, A.; Weidelt, P.; Przyklenk, A.

Book ID
121674407
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
929 KB
Volume
193
Category
Article
ISSN
0956-540X

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An analytical model is developed of an asymmetric electrode system immersed in a plasma, consisting of two dc-grounded electrodes, where the smaller one is biased at 13.56MHz. The model is compared with a set of experiments performed in a high density low pressure plasma source (an electron cyclotro