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Contact force identification using the subharmonic resonance of a contact-mode atomic force microscopy

✍ Scribed by Abdel-Rahman, Eihab M; Nayfeh, Ali H

Book ID
120432902
Publisher
Institute of Physics
Year
2005
Tongue
English
Weight
218 KB
Volume
16
Category
Article
ISSN
0957-4484

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The atomic force microscope (AFM) continues to fi nd increasing applications in nanoscale imaging, [ 1 ] metrology, [ 2 ] devices, [ 3 ] and manufacturing. [ 4 ] In these applications, tip size and shape critically affect the accuracy, resolution, and reliability of measurements and processes. [ 5 ]