๐”– Bobbio Scriptorium
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Construction of a system of adjoining base surfaces for shape accuracy checking on items of arbitrary shape

โœ Scribed by A. N. Avdulov; V. G. Shuster


Publisher
Springer US
Year
1983
Tongue
English
Weight
289 KB
Volume
26
Category
Article
ISSN
0543-1972

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Simple simulation of electron-beam litho
โœ D Xu ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 629 KB

This paper shows a simple approach to simulating the electron-beam lithography for sub-0.2 mm T-gate fabrication. Both the proximity parameters and the solubility rates of resists are experimentally determined. The simulation assumes that resists are removed at rates that are only governed by the lo