Construction of a plasma polymerization reactor system for laboratory use

✍ Scribed by F. Huber; J. Springer

• Publisher: John Wiley and Sons
• Year: 1996
• Tongue: English
• Weight: 491 KB
• Volume: 62
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/(sici)1097-4628(19961003)62:1<145::aid-app18>3.0.co;2-4

✦ Synopsis

A parallel-plate plasma polymerization reactor operating at radio frequency was constructed. The reactor is suitable for reproducible plasma deposition of ultrathin pinhole-free polymer layers onto various supports. Feed gas composition, plasma power, total gas flow, pressure, and substrate temperature can be selected independently of each other. The radio-frequency voltage applied to the excitation electrode can be measured. Optical plasma emissions registered by a spectroscope may be used to monitor the plasma process.