Considerations on the design of a dc sputtering system concerning its application to Ta and Si deposition

✍ Scribed by M.A Silveira; A.P Mammana

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 300 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)93966-m