7172. Considerations on the design of a dc sputtering system concerning its application to Ta and Si deposition: MA Silveria and AP Mammana, Vacuum, 41, 1990, 1390–1392

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 156 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90979-s