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Confirmation of {113} facets on diamond grown by chemical vapor deposition

✍ Scribed by K.A. Snail; Z.P. Lu; R. Weimer; J. Heberlein; E. Pfender; L.M. Hanssen

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 503 KB
Volume: 137
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)91014-6

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We have investi ated the effects of reactant residence time on the properties of microwav+a88isted CV % diamond films. Using a constant process pressure of 40 Torr and gas composition of 1% CHb in Hr? the total gas flow rate was adjusted from 25 to 800 seem. For OUT reactor, this correspond8 to res