Cone Structure Formation by Preferred Growth of Random Nuclei in Chemical Vapor Deposited Epitaxial Silicon Films

✍ Scribed by S. Noda; Y. Kajikawa; H. Komiyama

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 183 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20020503)8:3<87::aid-cvde87>3.0.co;2-q