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Conductivity enhancement of ZnO:F thin films by the deposition of SnO2:F over layers for optoelectronic applications

✍ Scribed by R. Anandhi; K. Ravichandran; R. Mohan

Book ID
119330645
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
882 KB
Volume
178
Category
Article
ISSN
0921-5107

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## Abstract In this study, the effects of postannealing on ZnO and Al~2~O~3~ films grown for a thin‐film transistor (TFT) by the atomic layer deposition (ALD) method were examined using transmission electron microscopy (TEM) and energy‐dispersion spectroscopy. Samples were subjected to rapid therma