Conductimetry and impedance spectroscopy study of low pressure metal organic chemical vapor deposition TiNxOy films as a function of the growth temperature: a percolation approach

✍ Scribed by F Fabreguette; M Maglione; L Imhoff; B Domenichini; M.C Marco de Lucas; P Sibillot; S Bourgeois; M Sacilotti

• Book ID: 108417410
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 96 KB
• Volume: 175-176
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(01)00121-0