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Concentrating performances of an ellipsoid-cone system for optical furnaces

โœ Scribed by Sh. R. Nurmatov; A. A. Abdurakhmanov; Sh. A. Faisiev; Z. Sh. Klychev; Sh. I. Klychev


Book ID
111493873
Publisher
Allerton Press, Inc.
Year
2010
Tongue
English
Weight
109 KB
Volume
46
Category
Article
ISSN
0003-701X

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We report on the design of an excimer-laser based system for high precision micromachining of spinnerets using a mask imaging technique. Both the illumination and imaging unit are optimized for specified demagnification ratios of 5 and 15, respectively. Detailed investigations were performed to meas