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Computer simulation of gates for ion-implanted devices

✍ Scribed by Alex, M.; Wu, J.C.; Kryder, M.H.


Book ID
114549743
Publisher
IEEE
Year
1988
Tongue
English
Weight
325 KB
Volume
24
Category
Article
ISSN
0018-9464

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Dynamic computer simulation of high ener
✍ Wolfhard MΓΆller πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 407 KB

For the simulation of high ener~', high fluence implantations, dynamic codes are necessary which take into account the mod!fication of the substance due to the presence of the implants" and due to collisional effects. In the present paper, we give a brief description of such a binapy collision simul