Computer simulated and channelling studies of damage distributions in phosphorus implanted silicon : H. Budinov and D. S. Karpuzov. Vacuum 38(11), 995 (1988)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 264 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90142-a