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Computer-controlled scanning electron microscope system for high-resolution microelectronic pattern fabrication

✍ Scribed by Ozdemir, F.S.; Wolf, E.D.; Buckey, C.R.

Book ID: 114590282
Publisher: IEEE
Year: 1972
Tongue: English
Weight: 725 KB
Volume: 19
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1972.17463

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