✦ LIBER ✦
Calibration of an off-axis quartz crystal thickness monitor for a pulsed laser deposition system using a high resolution scanning electron microscope
✍ Scribed by S.D. Walck; J.S. Zabinski; M.S. Donley; J.E. Bultman
- Book ID
- 107864309
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 481 KB
- Volume
- 236
- Category
- Article
- ISSN
- 0040-6090
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