A computer controlled patterning system
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A Lindell; P Davidsson; J Pekola
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Article
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1999
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Elsevier Science
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English
β 477 KB
A pattern generator system for lithography based on scanning force microscopes has been developed. Patterns to be miniaturized onto a chip can be scanned or drawn by any common graphical program. The pattern file is used to control a voltage simultaneously with the microscope probe scanning the surf