Compositional disordering and very-fine lateral definition of GaAs-AlGaAs superlattices by focused Ga ion beams

✍ Scribed by Y. Hirayama; Y. Suzuki; H. Okamoto

• Book ID: 118987037
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 361 KB
• Volume: 174
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(86)90393-6