✦ LIBER ✦
Compositional Disordering of GaAs-AlxGa1-xAs Superlattice by Ga Focused Ion Beam Implantation and its Application to Submicron Structure Fabrication
✍ Scribed by Hirayama, Yoshiro; Suzuki, Yoshifumi; Tarucha, Seigo; Okamoto, Hiroshi
- Book ID
- 115541836
- Publisher
- Institute of Pure and Applied Physics
- Year
- 1985
- Tongue
- English
- Weight
- 927 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0021-4922
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