Composition and chemical structure of ultra-thin a-C:F films deposited by RF magnetron sputtering with high pulsed bias

✍ Scribed by Tang, Guangze; Ma, Xinxin; Sun, Mingren

• Book ID: 122883812
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 183 KB
• Volume: 16
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2007.01.020