Competition of Epitaxy and Ion Beam Irradiation-Determined Texture during Ion Beam-Assisted Deposition of Gallium Nitride Films on r-Plane Sapphire

✍ Scribed by J.W. Gerlach; S. Sienz; W. Attenberger; B. Rauschenbach

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 366 KB
• Volume: 0
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.200390013